Open AccessStability of the intrinsic defects in unintentionally doped 4H-SiC epitaxial layer
Author(s) -
Peng Cheng,
Yuming Zhang,
Yimen Zhang,
YueHu Wang,
Hui Guo
Publication year - 2010
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.59.3542
Subject(s) - materials science , epitaxy , doping , layer (electronics) , stability (learning theory) , optoelectronics , condensed matter physics , engineering physics , nanotechnology , computer science , physics , machine learning