Open AccessDesign, fabrication and test of X-ray freestanding transmission gratings
Author(s) -
Jiang Ma,
Changqing Xie,
Tianchun Ye,
Ming Liu
Publication year - 2010
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.59.2564
Subject(s) - grating , blazed grating , materials science , optics , diffraction efficiency , diffraction , ultrasonic grating , diffraction grating , wavelength , holographic grating , fabrication , electromagnetically induced grating , optoelectronics , synchrotron radiation , physics , medicine , alternative medicine , pathology
The diffraction efficiency of freestanding x ray transmission gratings is discussed in relation to the wavelength and grating period using both scalar diffraction theory and rigorous coupled wave analysis, and the grating design is accordingly optimized. A gold freestanding x ray transmission grating with period of 300 nm, line/period ratio of 055, thickness of 200 nm a size of 1 mm ×1 mm and fractional grating area of 65% is fabricated. The absolute diffraction efficiency of the fabricated grating was tested at the National Synchrotron Radiation Laboratory in the wavelength region of 55— 38 nm. The test result shows that the grating has a maximum efficiency of nearly 10%. The grating also shows a stable diffraction efficiency in the wavelength region from 15 nm to 35 nm.