Open AccessPerformance analysis of the substrate-free focal plane array in infrared imaging
Author(s) -
Cheng Teng,
Qingchuan Zhang,
Dapeng Chen,
Xiaoping Wu,
Haitao Shi,
Jie Gao
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.852
Subject(s) - materials science , infrared , substrate (aquarium) , optics , dot pitch , cardinal point , thermal , pixel , optoelectronics , physics , oceanography , meteorology , geology
Based on the proposed optical readout uncooled infrared (IR) imaging systemseveral batches of the substrate-free focal plane array (FPA) with different pitches have been successively fabricatedand by using these fabricated FPAsthe thermal images were obtained at room temperature. Howeverthe theoretical analysis indicates that the deviation between the theoretical model assuming constant temperature of the supporting frames of the FPAs and the experimental results gradually increases with the decreasing pitch size of from 200μm to 60μm. Based on the finite element methodthe thermal characteristic of those FPAs was simulated and the reason for the deviation is found to be that the temperature-constant assumption is not quite appropriate for the substrate-free FPAand the absorption of the thermal radiation will obviously result in the temperature rise of the supporting framewhich would increase the temperature of the adjacent pixels. The imaging performance of the substrate-free FPA is also analyzed. Compared with the substrate FPA with the same pitch, the thermal detection sensitivity of the substrate-free FPA with 60μm pitch increases by about one order of magnitude.