Open AccessHydrophobic nature of fluorinated diamond-like carbon films prepared under different radio-frequency power
Author(s) -
Zhu Li,
Jiang Mei-Fu,
Ning Zhao-Yuan,
Du Juan,
Wang Pei-Jun
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.6430
Subject(s) - contact angle , materials science , carbon film , diamond like carbon , raman spectroscopy , surface roughness , carbon fibers , argon , graphite , surface finish , analytical chemistry (journal) , sputtering , sputter deposition , diamond , chemical engineering , composite material , thin film , nanotechnology , optics , composite number , organic chemistry , chemistry , physics , engineering
The fluorinated diamond-like carbon F-DLC films were prepared by reactive magnetron sputtering under different radio-frequency power with trifluoromethane CHF3 and argon Ar as source gases and pure graphite as a target. The hydrophobic nature of F-DLC films was studied. The result of measuring contact angle between double-stilled water and film surface shows that the maximal contact angle of film surface is approximately 115°. Factors influencing the hydrophobic nature of films were discussed by film surface morphology measured by atomic force microscopy AFM, Raman spectra as well as FTIR spectra. The result demonstrates that the hydrophobic nature of films lies on roughness and bonding configuration of film surfaces. The more the roughnessthe stroncer the hydrophobic nature isbut it doesnt show a simple decrease or increase with the content of F in films and the ratio of sp3/sp2. Radio-frequency power influences the deposition ratewhich correlates with the roughness of the filmproportion of mononuclear aromatics and bonding configuration of films surface ways of F combination.