Open AccessEffect of external magnetic field on ion energy density of collisional radio-frequency sheath
Author(s) -
Zou Xiu,
Zou Bin-Yan,
Huiping Liu
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.6392
Subject(s) - magnetic field , ion , plasma , physics , atomic physics , debye sheath , radio frequency , perpendicular , magnetic energy , energy (signal processing) , computational physics , magnetization , telecommunications , geometry , mathematics , quantum mechanics , computer science
A two-fluid model is proposed to describe the collisional radio-frequency plasma sheath in a magnetic field, and the ion energy distribution incident on the radio-frequency sheath biased electrode is numerically investigated. The simulation results reveal that the external magnetic field dominates the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular direction and parallel direction under the action of magnetic field.