Open AccessThe method for multi-beam laser heterodyne high-precision measurement of the glass thickness
Author(s) -
Yanchao Li,
Liang Zhang,
Yuexiang Yang,
GuiLu Long,
Bo Xu,
Chunhui Wang
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.5473
Subject(s) - heterodyne (poetry) , optics , laser , materials science , beam (structure) , accuracy and precision , doppler effect , laser doppler vibrometer , observational error , laser doppler velocimetry , laser beams , physics , acoustics , medicine , blood flow , statistics , mathematics , quantum mechanics , astronomy
Multi-beam laser heterodyne measurement of glass thiclcness is based on laser heterodyne measurement technology and laser Doppler technology. We deduced the harmonic expression of photodetector output current, discussed the feasibility and theory of the method which make use of the non-contact multi-beam laser heterodyne to increase the precision of the glass thickness measurement, and made simulation in different situation with Matlab. The results showed that the maximum error is 0.3% at different incidence angles in flat glass thickness measurement, which has an obvious advantage in accuracy over the other methods.