Open AccessMolecular dynamics simulation of the structure characteristic of diamond-like carbon films influence by oblique incidence ion-beam-assisted deposition
Author(s) -
Kai Hu,
Yunchao Li,
Guo De-Cheng,
Shuang Li,
Zhijie Li
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.4888
Subject(s) - ion beam assisted deposition , materials science , ion beam , ion , deposition (geology) , ion beam mixing , kinetic energy , ion beam deposition , atomic physics , beam (structure) , carbon fibers , diamond , molecular physics , optics , chemistry , physics , composite material , paleontology , organic chemistry , quantum mechanics , sediment , composite number , biology
On atomic scale, using molecular dynamics MD simulation, the influence of different ion-beam incident angles on the structure of diamond-like carbon DLC films was discussed in the process of ion-beam-assisted deposition IBAD. The study focused on the model of film surface, average density and SP3 hybridization fraction under different ion beam incidence angles. The results showed that horizontal kinetic energy of the incident atoms was enhanced by the oblique incident assist ions, thereby the horizontal migration of the C-atoms were also enhanced. The ratio of migration of C-atoms with ion-beam oblique incidence became greater than with verticalineidace, however, the density of the film and SP3 hybridization fraction became smaller. The effect of different ion-beam incident angle on the films structure varies with the variation of assistance/deposition atomic ratio Ar/C and incident energy. Thus films with different structures could be obtained when the incidence of ion-beam is oblique.