Open AccessThe temperature characteristics of stress-induced voiding in Cu interconnects
Author(s) -
Zhenyu Wu,
Chai Chang-Chun,
Yuejin Li,
Jing Liu,
Jiayou Wang,
Yintang Yang
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.2625
Subject(s) - materials science , stress (linguistics) , temperature gradient , diffusion , nucleation , composite material , mechanics , thermodynamics , physics , philosophy , linguistics , quantum mechanics
A stressinduced voiding model based on the NabarroHerring mechanism has been proposed. The stressinduced voiding phenomena in Cu interconnects have been studied by the FIB crosssection technique and stress modeling. The driving force for the formation of stressinduced voids has been investigated. The relationship between stressinduced voiding, temperature, stress gradient and the dominant diffusion path are discussed. The results show that stress and stress gradient reach their peak values at the top surfaces of Cu M1 lines underneath the corner of the vials where voids are observed. Stress gradient shows crucial effect on the failure spot and the voiding rate. Stress migration is basically a diffusion and nucleation process of vacancies through the main diffusion path under the force of the stress gradient. The stress gradient and the diffusion terms vary oppositely with temperature and the maximum voiding rate is reached at a medium temperature.