Open AccessHourglass-shaped X-ray compound refractive lens made by back-mask exposure technology
Author(s) -
Zhao Yan-qing,
Liang Jing-qiu,
Zhongzhu Liang,
Xiang Huang,
Z Le,
FeiYan Yi,
Feng Hou,
Wei-Min Huang,
Wei Dong,
weijie wang,
Z L Wang,
Na Cui
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.1526
Subject(s) - hourglass , monochromatic color , optics , lens (geology) , masking (illustration) , materials science , dimension (graph theory) , x ray optics , optoelectronics , physics , x ray , astronomy , art , mathematics , pure mathematics , visual arts
Using back-mask exposure technologythe hourglass-shaped X-ray compound refractive lens XCRL was made. Firstlythe theory of the refractive focusing of the hourglass-shaped XCRL was analyzed. Then the hourglass-shaped XCRL was manufactured using back-mask exposure technology for the first timewhich avoids two-time masking and reduces the transfer times of the figure. The refractive focusing performance of the lens was tested with 10?keV monochromatic X-ray. The experimental results indicated that it has good focusing performance in one dimension, which is in general coincident with the calculated results.