Open AccessRecent progress in cubic boron nitride film synthesis
Author(s) -
Hangsheng Yang,
Anmin Nie,
Jianying Zhang
Publication year - 2009
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.58.1364
Subject(s) - boron nitride , materials science , nitride , boron , nanotechnology , thin film , engineering physics , optoelectronics , chemistry , organic chemistry , layer (electronics) , engineering
Cubic boron nitride (cBN) thin films, as artificially prepared materials, have excellent mechanical, thermal, electronic and optical properties, thus have potentially significant technological applications in cutting tools, high-temperature electronic devices, and protective coatings for optical elements. Cubic BN films have attracted worldwide attention since the early 1980s; however, a numbers of difficulties hindered their applications. In this paper, recent important achievements in cBN film preparation are reviewed, and perspectives for future study of cubic boron nitride film are presented.