Open AccessThe research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering
Author(s) -
Liang Han,
Yang Zhao,
Haibo Zhang
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.996
Subject(s) - magnetic field , computational physics , scalar (mathematics) , scalar field , computer science , field (mathematics) , intensity (physics) , physics , optics , mathematics , classical mechanics , quantum mechanics , geometry , pure mathematics
Half-analytical method is a new method of calculating electromagnetic field. In this paper, this method is applied to analyzing magnetic field in unbalanced magnetron sputtering system. There are less unknown variables with this method in the solving process and the result has high accuracy. This method is better the oretically founded compared with the equivalent source method. The expression of scalar potential function is an analytic series, which favors calculating field intensity and optimization.