Open AccessDesign and fabrication of gold transmission phase gratings for soft X-rays
Author(s) -
Keqiang Qiu,
Xiangdong Xu,
Ying Liu,
Hong Ye,
Shaojun Fu
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.6329
Subject(s) - optics , materials science , diffraction efficiency , diffraction , diffraction grating , duty cycle , grating , blazed grating , holography , lithography , optoelectronics , fabrication , phase (matter) , physics , medicine , alternative medicine , pathology , quantum mechanics , power (physics)
The diffraction efficiency of a gold transmission phase grating is simulated as a function of the depth of grooves and the duty cycle on the basis of the scalar diffraction theories. It is shown that the +1 order diffraction efficiency of a transmission phase grating with appropriate groove depth and duty cycle can beup to 21.9% of the incident lightwhereas it is no greater than 10% for a conventional amplitude-mode transmission grating. Transmission gratings with area of 20mm×5mmperiod of 1μmduty cycle of 0.55 and 200nm thick gold bars supported by a membrane of 300nm thick polyimide have been fabricated by combining holographic lithography and electroplating. Its diffraction efficiency has been measured in national synchrotron radiation laboratoryand the maximum efficiency in +1 order is about 16% at λ=7.425nm.