Design and fabrication of gold transmission phase gratings for soft X-rays | Zendy

Keqiang Qiu | Zendy; Xiangdong Xu | Zendy; Liu Ying | Zendy; Hong Yi-lin | Zendy; Shaojun Fu | Zendy

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Design and fabrication of gold transmission phase gratings for soft X-rays

Author(s) -

Keqiang Qiu,

Xiangdong Xu,

Liu Ying,

Hong Yi-lin,

Shaojun Fu

Publication year - 2008

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.57.6329

Subject(s) - optics , materials science , diffraction efficiency , diffraction , diffraction grating , duty cycle , grating , blazed grating , holography , lithography , optoelectronics , fabrication , phase (matter) , physics , medicine , alternative medicine , pathology , quantum mechanics , power (physics)

The diffraction efficiency of a gold transmission phase grating is simulated as a function of the depth of grooves and the duty cycle on the basis of the scalar diffraction theories. It is shown that the +1 order diffraction efficiency of a transmission phase grating with appropriate groove depth and duty cycle can beup to 21.9% of the incident lightwhereas it is no greater than 10% for a conventional amplitude-mode transmission grating. Transmission gratings with area of 20mm×5mmperiod of 1μmduty cycle of 0.55 and 200nm thick gold bars supported by a membrane of 300nm thick polyimide have been fabricated by combining holographic lithography and electroplating. Its diffraction efficiency has been measured in national synchrotron radiation laboratoryand the maximum efficiency in +1 order is about 16% at λ=7.425nm.

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