Open AccessEffect and mechanism of water on carbon nanotubes growth
Author(s) -
Chunmei Zhang,
Xinchao Bian,
Qiang Chen,
Yabo Fu,
Yuefei Zhang
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.4602
Subject(s) - carbon nanotube , materials science , plasma enhanced chemical vapor deposition , dielectric barrier discharge , chemical engineering , methane , scanning electron microscope , hydrogen , chemical vapor deposition , carbon fibers , water vapor , nanotechnology , dielectric , composite material , chemistry , organic chemistry , composite number , optoelectronics , engineering
Carbon nanotubes (CNTs) were grown on 25 nm Ni coated Si substrate by dielectric barrier discharge (DBD)-type plasma enhanced chemical vapor deposition (PECVD) in downstream. The temperature was 973 K and the mixture gases were methane, hydrogen and water. The contribution of water concentration on the growth of carbon nanotubes was investigated. Scanning electron microscopy (SEM) results showed that the grown CNTs in CH4/H2 gas mixure had chain-shaped structure and the diameter was about 40—90nm. With the addition of proper amount of water, the diameter of CNTs became uniform, and the surfaces of nanotubes were fully covered with nano-sized node-like structures. When more water was added, branched carbon nanotubes were synthesized. Optical emission spectra of the plasma during synthesis of carbon nanotubes were in-situ detected for the purpose of understanding the water effect.