Open AccessExperimental studies on the properties of the discharge modes in a cylindrical radio frequency inductively coupled plasma
Author(s) -
Zhiyong Ding,
Yuan Guo-Yu,
Gao Wei,
Jing Sun
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.4304
Subject(s) - radio frequency , materials science , impedance matching , capacitance , rf power amplifier , plasma , electromagnetic coil , electrical impedance , inductively coupled plasma , voltage , coupling (piping) , induction coil , physics , nuclear magnetic resonance , atomic physics , electrical engineering , optoelectronics , electrode , amplifier , cmos , metallurgy , engineering , quantum mechanics
In this paper, Z-scan, current and voltage probe were used to measure rf discharge power, coupling coil rf current, voltage and dc plasma floating voltage in RF inductive dischargr, and the effects of impedance matching network, coil coupling intensity and the source ground area on the properties of E,H mode and the mode transition are investigated. The positive and negative feedback regions are put forth on the basis of the influence of the series capacitance in a Γ-type impedance matching network on RF output power of the RF power source. It is experimentally founded that under identical experimental parameters, the discharge mode evolution is apt to be discontinuous and continuous in the positive and negative feedback regions, respectively. In addition, the threshold coil RF current (or plasma absorbed power) corresponding to the mode transition, the hysteresis loop width, the difference in plasma absorbed power during the discharge mode transition vary evidently with the series capacitance of the impedance matching network. The threshold coil RF current of E-H mode transition is not necessarily higher than that of H-E mode transition. In combination with the influences of impedance matching network and discharge pressure, the modes of transition are diversified for different ground areas.