The influence of n-layer on structural properties of i-layer in n-i-p μc-Si∶H thin film solar cells | Zendy

Yujie Yuan | Zendy; Guofu Hou | Zendy; Xue Jun-Ming | Zendy; Han Xiao-Yan | Zendy; Liu Yun-Zhou | Zendy; Yang Xing-Yun | Zendy; Lijie Liu | Zendy; Pei Dong | Zendy; Ying Zhao | Zendy; Ziyang Hu | Zendy

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The influence of n-layer on structural properties of i-layer in n-i-p μc-Si∶H thin film solar cells

Author(s) -

Yujie Yuan,

Guofu Hou,

Xue Jun-Ming,

Han Xiao-Yan,

Liu Yun-Zhou,

Yang Xing-Yun,

Lijie Liu,

Pei Dong,

Ying Zhao,

Ziyang Hu

Publication year - 2008

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.57.3892

Subject(s) - materials science , layer (electronics) , microcrystalline , plasma enhanced chemical vapor deposition , amorphous solid , thin film , microcrystalline silicon , chemical vapor deposition , deposition (geology) , thin film solar cell , analytical chemistry (journal) , composite material , amorphous silicon , optoelectronics , crystallography , nanotechnology , chemistry , crystalline silicon , chromatography , paleontology , sediment , biology

The intrinsic layers with different thickness were deposited on amorphous n-type layers and microcrystalline n-type layers respectively, and all samples were prepared by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). The effect of different n-type layers on structural properties of i-layer was studied. It is concluded that the highly microcrystalline n-layer can reduce the thickness of incubation layer, promote structural uniformity of i-layer and improve the performance of n-i-p μc-Si:H thin film solar cells.

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