Open AccessThe effect of infrared laser-induced micro/nano photothermal expansion and the novel method of photothermal actuation
Author(s) -
Dongxian Zhang,
Chao Liu,
Haijun Zhang
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.3107
Subject(s) - microactuator , materials science , photothermal therapy , deflection (physics) , photothermal effect , laser , microelectromechanical systems , infrared , optics , thermal expansion , optoelectronics , thermal , actuator , nanotechnology , composite material , computer science , physics , artificial intelligence , meteorology
This paper presents a novel asymmetric microactuator based on photo-thermal expansion. It has an asymmetric structure consisting of two thin expansion arms with different widths. When a beam of infrared laser irradiates the armsthe different increases in temperature and photo-thermal expansion controlled by the different rates of specific surface area causes a magnified lateral deflection. In the paperthe thermodynamic model is introducedand the computing formula of lateral deflection is given. A prototype microactuator of 750μm length has been manufactured by using the excimer laser micromaching system Optec Promaster with an infrared laser diode (998nm) as the external power source to activate the microactuator. Then we carried out feasibility experiments by using a monitored control system made by our laboratoryand measured the relationship between the lateral deflection and laser power. The experiment results demonstrate that the deflection of the microactuator reached 258μm at 16mW infrared laser power. The photo-thermal microactuator has the advantages of simple structureadjustable deflectionno electromagnetic interferenceeasy integrating and remote controlling. It will be quite useful for applications in the fields of micro/nano-technology and micro-electro-mechanical systems (MEMS).