Open AccessInvestigation on the improvement of the stability and uniformity of solution-based metal-induced crystallization poly-Si using surface-embellishment
Author(s) -
He Li,
Xuedong Li,
Juan Li,
Congcong Wu,
Zhiguo Meng,
Shanxin Xiong,
Lizhu Zhang
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.2476
Subject(s) - materials science , nickel , crystallization , grain size , salt (chemistry) , metal , chemical engineering , composite material , metallurgy , chemistry , engineering
To obtain poly-Si with good uniformity and stability, a new method of solution-based metal-induced crystallization (S-MIC) with surface-embellishment wasproposed in this paper. A special solution that can embellish the surface of a-Si was employed to improve the conglutination between nickel and a-Si thin film. Before the nickel solution was spin coated, the special solution was spin coated on the a-Si sample at first. By controlling the nickel salt concentration, the poly-Si with grain size of 20—70 μm and good uniformity could be achieved. Furthermore, the nickel salt concentration is lower than that used in the traditional method of S-MIC by 1 or 2 orders of magnitude.