Open AccessImproving parallel electrode method by sputtering atoms' angle distribution rule
Author(s) -
Guofeng Xie
Publication year - 2008
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.57.1784
Subject(s) - sputtering , trim , materials science , atomic physics , electrode , voltage , extraction (chemistry) , optoelectronics , computer science , physics , thin film , chemistry , nanotechnology , chromatography , operating system , quantum mechanics
In atomic vapor laser isotope separation (AVLIS) engineering, the parallel electrode method has the advantage of simple structure, but when the extraction voltage is high, the sputtering loss is very large and the collection ratio is very low. This paper calculates the angular distribution of sputtering atoms by Trim code. The results show that the angular distribution follows the cosine rule. The collection method is modified according to the rule, which makes the collection ratio very high.