Open AccessStudy of nonlinear identification of time series of vibration on transducer in ultrasonic bonding system
Author(s) -
Aijun Song,
Lei Han
Publication year - 2007
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.56.3820
Subject(s) - transducer , ultrasonic sensor , nonlinear system , acoustics , vibration , materials science , series (stratigraphy) , microelectromechanical systems , computer science , physics , optoelectronics , geology , paleontology , quantum mechanics
Using high temperatures and ultrasonic, ultrasonic bonding is one of the main methods in the wire bonding technology of the MEMS. The vibrations of transducer were tested. Based on the phase reconstruction theory, identification of the nonlinear characteristics was developed. In comparison with the time series along the axial direction, pitching direction and the horizontal direction, the correlated dimensions have been calculated, clearly describing the nonlinear dynamic characteristics of the transducer. It is helpful for understanding of transducer and can be used as a guide for modeling of this complicated structure.