Open AccessSurface acoustic wave properties of ZnO films grown by magnetron sputtering
Author(s) -
Guang Yang,
P. V. Santos
Publication year - 2007
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.56.3515
Subject(s) - materials science , full width at half maximum , sputter deposition , thin film , sputtering , diffraction , wavelength , optoelectronics , fabrication , surface acoustic wave , optics , cavity magnetron , nanotechnology , physics , medicine , alternative medicine , pathology
In this letter we report the fabrication and structural properties of ZnO thin films grown on GaAsAu/GaAsSi and glass substrates by rf magnetron sputtering. The x-ray diffraction data indicated that all the ZnO films were pure c-axis oriented and the rocking curves showed that the full-width at half maximum(FWHM) of ZnO(002) peak of ZnO/Au/GaAs films is as small as 2.41°. The SEM images showed better surface for the ZnO films grown with Au buffer. The surface acoustic wave properties of IDT/ZnO/GaAs filter were measured by HP8753C network analyzer. The results indicated that the insertion loss is only 10.4dB and the electric efficiency can be up to 84.1% using the 5.6μm-wavelength IDT.