Open AccessAs-soak dependence of interface roughness of AlSb/InAs superlattice
Author(s) -
Zhihua Li,
Wenxin Wang,
Linsheng Liu,
Jiang Zhong-Wei,
Hanchao Gao,
Jian Zhou
Publication year - 2007
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.56.1785
Subject(s) - superlattice , x ray reflectivity , materials science , reflectivity , surface finish , interface (matter) , optoelectronics , optics , condensed matter physics , composite material , physics , capillary number , capillary action
Different As-soak time is applied during InSb-like interfaces growth of InAs/AlSb superlattices on GaAs(100) substrates. The interface roughness is studied by grazing incidence X-ray reflectivity. The reflectivity curves are simulated by standard software and the rms roughness of the interfaces is obtained. It was hown that the sample with As-soak time of 20 seconds has the most smooth interfaces. By analyzing the microscope images of the samples, we suggest that In-rich interfaces will be formed with too short As-soak time and AlAs-like interfaces are obtained with too long As-soak time, and in hoth cases the interface will be cearsened. Grazing incidence X-ray reflectivity is also recommended as a powerful tool for assessing the structure of superlattices.