Open AccessStructural properties of ZnO: In thin films prepared by sol-gel spin-coating technique
Author(s) -
Wei Lan,
Liu Xue-Qin,
Huang Chun-Ming,
Guomei Tang,
Yang Yang,
Yinyue Wang
Publication year - 2006
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.55.748
Subject(s) - materials science , thin film , diffraction , spin coating , fourier transform infrared spectroscopy , layer (electronics) , doping , photoluminescence , analytical chemistry (journal) , sol gel , x ray crystallography , coating , optics , composite material , optoelectronics , nanotechnology , chemistry , physics , chromatography
ZnO∶In thin films with thickness varying in the 210—240nm range were prepared on quartz substrates by sol_gel spin_coating technique. The structural properties of these thin films (In/Zn=0, 1, 2, 3 and 5at%) were studied by grazing incidence X_ray diffraction, conventional X_ray diffraction, Fourier transform infrared spectroscopy, atomic force microscopy and photoluminescence. It is found that the ZnO∶In thin films are composed of the unstressed bulk layer packed up by large grains with (002) plane and the surface layer by small grains with (002) and (103) planes, and a proper In doping concentration can improve structural properties of ZnO thin films. The analytic results were further proved by grazing incidence X_ray diffraction at different incidence angles (α=1, 2, 3 and 5°).