Microstructure and optical constants of sputtered Ag films of different thickness | Zendy

Xilian Sun | Zendy; Ruijin Hong | Zendy; Hongji Qi | Zendy; Fan Zheng-Xiu | Zendy; Jianda Shao | Zendy

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Microstructure and optical constants of sputtered Ag films of different thickness

Author(s) -

Xilian Sun,

Ruijin Hong,

Hongji Qi,

Fan Zheng-Xiu,

Jianda Shao

Publication year - 2006

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.55.4923

Subject(s) - materials science , microstructure , diffraction , sputtering , wavelength , deposition (geology) , optics , sputter deposition , thin film , composite material , optoelectronics , nanotechnology , physics , paleontology , sediment , biology

Ag films with different thickness from 8.2nm to 107.2nm were prepared by DC sputtering deposition and analyzed by X-ray diffraction with the help of optimization program on computer. Microstructrue analysis shows that the films are made of fcc-Ag particles. With the increase of thickness, the mean size of Ag particles increases and the interplaner spacing decreases gradually. The optical constants computed by computer program shows that n value decreases quickly with the increasing thickness below 17.5nm and k value changes in reverse, and then go steadily when the thickness is larger than 17.5nm at the wavelength of 550nm.

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