Open AccessStudy on the preparation of high barrier hydrogenated carbon film and its properties
Author(s) -
Guangliang Chen,
Yulong Ge,
Yuefei Zhang,
Zhang Guang-qiu,
Guling Zhang,
Jiuli Wang,
Liu Yuan-Fu,
Wanmiao Gu,
Wenran Feng,
Chizi Liu,
Yang Si
Publication year - 2005
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.54.818
Subject(s) - materials science , carbon film , chemical vapor deposition , raman spectroscopy , plasma enhanced chemical vapor deposition , x ray photoelectron spectroscopy , carbon fibers , fourier transform infrared spectroscopy , hydrogen , thin film , chemical engineering , analytical chemistry (journal) , permeation , nanotechnology , composite material , membrane , optics , chemistry , organic chemistry , engineering , composite number , physics , biochemistry
Hydrogenated carbon thin films were fabricated on the surface of polyethylene terepthalate(PET) by radio frequency plasma enhanced chemical vapor deposition (r. f.PECVD).The film structure properties were studied by means of atomic force mic roscope(AFM), x_ray photo_electron (XPS), laser Raman spectroscopy, Fourier_tra nsform infrared spectra(FTIR),etc. The barrier property of the film was conducte d on the water vapor permeation instrument. The results show that nano_hydrogen ated carbon films have been deposited on PET surface and they are mainly compose d of sp2 and sp3 hybridized hydrogenated carbon compounds. Plasma pa rameters influence the films' growth rate and structure characteristics. The fil m reduces the water vapor permeation ratio of the PET by 7 times at a film thick ness of only 900nm.