Open AccessModeling analysis of gradient-index coatings prepared by reactive magnetron sputtering
Author(s) -
Zicai Shen,
Jianda Shao,
Yingjian Wang,
Fan Zheng-Xiu
Publication year - 2005
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.54.4842
Subject(s) - partial pressure , materials science , refractive index , coating , cavity magnetron , sputtering , sputter deposition , deposition (geology) , index (typography) , pressure gradient , analytical chemistry (journal) , composite material , thin film , mechanics , optoelectronics , nanotechnology , physics , chemistry , computer science , oxygen , chromatography , paleontology , sediment , world wide web , biology , quantum mechanics
The formation mechanism of gradient-index coatings by reactive magnetron sputtering is discussed. A practical modeling of gradient-index coatings is propose d, the relationship between refractive index of coatings and pressure of reactiv e gas is established. Next, we discussed the changing rule of partial-pressure o f reactive gas with time requivcd for obtaining a desired refractive index of g radient coatings under specific deposition conditions. A linear coating is tak en as example to illustrate how to get the relationship between partial-pressure of reactive gas and time.