Open AccessEffect of the laser power density on the properties and structures of the diamond-like carbon films deposited by pulsed laser ablation of graphite
Author(s) -
Hongyan Peng,
Zhou Chuan-Sheng,
Lei Zhao,
Zengsun Jin,
Bing Zhang,
Baoling Chen,
Yuqiang Chen,
Minjun Li
Publication year - 2005
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.54.4294
Subject(s) - materials science , diamond , carbon film , laser , highly oriented pyrolytic graphite , raman spectroscopy , power density , laser ablation , amorphous carbon , pyrolytic carbon , graphite , amorphous solid , optoelectronics , pulsed laser deposition , excimer laser , synthetic diamond , optics , thin film , nanotechnology , composite material , power (physics) , physics , chemistry , quantum mechanics , pyrolysis , engineering , waste management , organic chemistry
Diamond-like carbon films were deposited by high-frequency and high-power pulse d XeC1 excimer laser ablation of pyrolytic graphite targets in a high vacuum ch amber at room temperature. The effects of the laser power density on the propert ies and structures of the films were studied by setting the laser power density on the target at 108, 109 and 1010W/cm2. The optical transparency and the optical band gap as well as the electron diffraction patterns and Raman spectra of the films were investigated. The results demonstrated that the stru ctures of the films varied from amorphous to nanocrystalline diamond with the l aser power density increasing from 108 to 1010W/cm2.