Open AccessIons extraction and collection using the RF resonance method and taking into consideration the sputtering loss
Author(s) -
Guofeng Xie,
Dewu Wang,
Ying Chun-Tong
Publication year - 2005
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.54.2147
Subject(s) - sputtering , materials science , ion , extraction (chemistry) , collision , resonance (particle physics) , atomic physics , analytical chemistry (journal) , nuclear magnetic resonance , physics , chemistry , computer science , thin film , nanotechnology , chromatography , computer security , quantum mechanics
One_dimensional ions extraction and collection using the RF resonance method is studied by PIC-MCC simulation. The energy and angle distribution of extracted ions is recorded and the sputtering loss is calculated. The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher col lection ratio; the extraction time and collision loss are decreased with increas ing extraction voltage, but the sputtering loss increases and collection ratio d ecreases; collision loss is decreased with increasing magnetic field, but the sp uttering loss increases and collection ratio decreases.