Open AccessEffect of RF power on the structure and properties of diamond-like carbon films
Author(s) -
Hongxuan Li,
Tao Xu,
Jianmin Chen,
Zhou Hui-Di,
Huiwen Liu
Publication year - 2005
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.54.1885
Subject(s) - materials science , plasma enhanced chemical vapor deposition , raman spectroscopy , x ray photoelectron spectroscopy , chemical vapor deposition , rf power amplifier , diamond , carbon film , carbon fibers , diamond like carbon , optoelectronics , analytical chemistry (journal) , radio frequency power transmission , radio frequency , thin film , composite material , nanotechnology , chemical engineering , composite number , optics , chemistry , amplifier , telecommunications , physics , cmos , chromatography , computer science , engineering
Diamond-like carbon (DLC) films were deposited on Si substrates by a dual direct current and radio frequency plasma-enhanced chemical vapor deposition (DC-RF-PECVD) technique. The effect of RF power on the surface morphology, micros tructure, hardness and Young's modulus of DLC films was investigated by atomic f orce microscopy, Raman spectroscopy, x-ray photoelectron spectrometry, infrared spectroscopy and nano-indentation. The films produced by DC-RF-PECVD have typical hydrogenated diamond-like characteristics, and the surface of the film s was smooth and compact.With the increase of RF power the bonded hydrogen conte nt in the films decreased while the sp33 content, hardness and Youn g's modulus of the DLC films reached the maxima at an RF power of 100W and then they decr eased with further increase of the RF power.