Open AccessIon extraction and collection studied by parallel electrode method on considerin g sputtering loss
Author(s) -
Guofeng Xie,
Dewu Wang,
Ying Chun-Tong
Publication year - 2005
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.54.1543
Subject(s) - sputtering , materials science , ion , extraction (chemistry) , electrode , atomic physics , plasma , particle (ecology) , analytical chemistry (journal) , monte carlo method , physics , chemistry , nanotechnology , thin film , nuclear physics , chromatography , oceanography , statistics , mathematics , quantum mechanics , geology
One-dimensional ion extraction and collection is studied by parallel electrode method using particle in cell_Monte Carlo collision (PIC-MCC) simulation. The e nergy and angle distribution of extracted ions is recorded and the sputtering lo ss is calculated. The results show that the extraction time and collision loss a re decreased by increasing extraction voltage, but the sputtering loss increases and collection ratio decreases. The extraction time is decreased and the collec tion ratio is increased by increasing electron temperature, while the extraction time is increased and the collection ratio is decreased by increasing initializ ed plasma density;and the collision loss is decreased and the collection ratio i s increased, if the target isotope concentration is higher. Improving the parall el electrode method leads to decreasing sputtering loss and increasing collectio n ratio greatly.