Open AccessPhotoluminescence centers and shift of ZnO films deposited by rf magnetron sputtering
Author(s) -
Li Huo-Quan,
Ning Zhao-Yuan,
Cheng Shan-Hua,
Jiang Mei-Fu
Publication year - 2004
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.53.867
Subject(s) - photoluminescence , materials science , sputter deposition , sputtering , optoelectronics , cavity magnetron , acceptor , wavelength , zinc , analytical chemistry (journal) , thin film , nanotechnology , condensed matter physics , chemistry , physics , metallurgy , chromatography
ZnO films deposited by rf magnetron sputtering with different stoichimetries were made by varing Ar/O2 flow rate during the depositions, and annealed in vacuum. The photoluminescence measurements show that the films have strong blue emission. As O2 gas flow decreases, the blue emission peak moves to long wavelength side. The blue emission may correspond to the electron transition from the bottom of the conduction band to the acceptor level composed of zinc defects.