Open AccessInfluence of rf power on the microstructure and magnetic properties of Fe-Si-B-Nb-Cu thin films
Author(s) -
石旺舟,
梁锐生,
马学鸣,
杨燮龙
Publication year - 2004
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.53.3614
Subject(s) - materials science , thin film , amorphous solid , microstructure , sputtering , nuclear magnetic resonance , analytical chemistry (journal) , nanotechnology , crystallography , composite material , physics , chemistry , chromatography
Fe_Si_B_Nb_Cu alloy thin films were deposited by radio frequenc y (rf) magnetro_sputtering. Their microstructures have been analysed by x_ray di ffraction (XRD) and Mssbauer spectrum. The results show that the thin films, p repared by low rf power, are amorphous. With the increase of rf power, the depo sited thin films were turned to be a mixted structure composed of nano_crystals and amorphous matrix. The nano_crystals contain α_Fe(Si) and α_Fe(B) solid solutio ns, which are in nanometer size, their relative volume fractions, atomic assembly features , magnetic moment orientations and macro_magnetic properties are changed under d ifferent rf powers.