Influence of rf power on the microstructure and magnetic properties of Fe-Si-B-Nb-Cu thin films | Zendy

Wangzhou Shi | Zendy; Ruisheng Liang | Zendy; Xueming Ma | Zendy; Yang Xielong | Zendy

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Influence of rf power on the microstructure and magnetic properties of Fe-Si-B-Nb-Cu thin films

Author(s) -

Wangzhou Shi,

Ruisheng Liang,

Xueming Ma,

Yang Xielong

Publication year - 2004

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.53.3614

Subject(s) - materials science , thin film , amorphous solid , microstructure , sputtering , nuclear magnetic resonance , analytical chemistry (journal) , nanotechnology , crystallography , composite material , physics , chemistry , chromatography

Fe_Si_B_Nb_Cu alloy thin films were deposited by radio frequenc y (rf) magnetro_sputtering. Their microstructures have been analysed by x_ray di ffraction (XRD) and Mssbauer spectrum. The results show that the thin films, p repared by low rf power, are amorphous. With the increase of rf power, the depo sited thin films were turned to be a mixted structure composed of nano_crystals and amorphous matrix. The nano_crystals contain α_Fe(Si) and α_Fe(B) solid solutio ns, which are in nanometer size, their relative volume fractions, atomic assembly features , magnetic moment orientations and macro_magnetic properties are changed under d ifferent rf powers.

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