Open AccessFabrication and photonic band gap property of the two-dimensional square lattice based on silicon
Author(s) -
M. Zhou,
Xiaoshuang Chen,
Jing Xu,
Lu Wei
Publication year - 2004
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.53.3583
Subject(s) - photonic crystal , finite difference time domain method , materials science , spectrometer , photonics , silicon , optics , fabrication , band gap , inductively coupled plasma , square lattice , optoelectronics , plasma , physics , condensed matter physics , medicine , alternative medicine , pathology , quantum mechanics , ising model
Two_dimensional air_cylinder photonic crystals were fabricated based on silicon by using the multiplex inductively coupled plasma system supplied by STS company . Photonic band gap was theoretically calculated by using the finite different t ime domain (FDTD) method, and the reflection spectrum was measured experimentall y using the microscope infrared spectrometer instrument. We find that the reflec tion measurements are in good agreement with the theoretically expected behaviour.