Fabrication and photonic band gap property of the two-dimensional square lattice based on silicon | Zendy

Zhou Mei | Zendy; Xiaohong Chen | Zendy; Xu Jing | Zendy; Wei Lu | Zendy

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Fabrication and photonic band gap property of the two-dimensional square lattice based on silicon

Author(s) -

Zhou Mei,

Xiaohong Chen,

Xu Jing,

Wei Lu

Publication year - 2004

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.53.3583

Subject(s) - photonic crystal , finite difference time domain method , materials science , spectrometer , photonics , silicon , optics , fabrication , band gap , inductively coupled plasma , square lattice , optoelectronics , plasma , physics , condensed matter physics , medicine , alternative medicine , pathology , quantum mechanics , ising model

Two_dimensional air_cylinder photonic crystals were fabricated based on silicon by using the multiplex inductively coupled plasma system supplied by STS company . Photonic band gap was theoretically calculated by using the finite different t ime domain (FDTD) method, and the reflection spectrum was measured experimentall y using the microscope infrared spectrometer instrument. We find that the reflec tion measurements are in good agreement with the theoretically expected behaviour.

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