Open AccessXPS study of fluorinated diamond-like carbon films prepared by reactive magnetron sputtering
Author(s) -
Jiang Mei-Fu,
Ning Zhao-Yuan
Publication year - 2004
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.53.3220
Subject(s) - materials science , x ray photoelectron spectroscopy , sputtering , analytical chemistry (journal) , sputter deposition , argon , diamond like carbon , raman spectroscopy , cavity magnetron , band gap , fluorine , thin film , optoelectronics , optics , nanotechnology , chemical engineering , chemistry , organic chemistry , engineering , physics , metallurgy
Fluorinated diamond_like carbon(F_DLC) films were prepared by radio frequency(RF) reactive magnetron sputtering with trifluoromethane (CHF3) and argon as source gases, and pure graphite as a targ et. The influence of source gas flow rate ratio on the film bonding configuration, sp2/sp3 hybrid ratios and optical band gap were investigated by Raman, Infrared transmission spectra, UV_visible spectra and XPS spectra. The results show that F-DLC films with high fluorine content, wide optical band gap and ultra-low diel ectric constant can be prepared by RF reactive magnetron sputtering technique in low input RF power (60W), high pressure (2.0Pa) and proper sour ce gas flow ratio (Ar/CHF3=2∶1).