Open AccessThe study on the microstructure of TiN and Ti1-xSixNy coatings
Author(s) -
Chenhui Zhang,
Luo Jianbin,
Wenzhi Li,
Darong Chen
Publication year - 2004
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.53.182
Subject(s) - tin , materials science , microstructure , transmission electron microscopy , amorphous solid , coating , grain size , composite material , metallurgy , crystallography , nanotechnology , chemistry
The microstructure of TiN coatings and Ti1-xSixNy nanocomposite coatings was studied by means of x-ray diffrection, x-ray photoelection spectroscopy, high resolution transmission electron microscopy and atomic force microscopy. The results showed that the Ti1-xSixNy coatings consisted of TiN nanocrystallites with grain size of 3-5nm and amorphous Si3N4 phase. The roughness of Ti1-xSixNy coatings was less than that of TiN coatings prepared under the same conditions. The orientation of TiN crystals in the Ti1-xSixNy coatings was discussed on the basis of interface energy.