Open AccessStudy on the sputtering mechanism of SiO2 irradiated with MeV Si ions
Author(s) -
Jianming Xue,
S. Ninomiya,
N. Imanishi
Publication year - 2004
Publication title -
acta physica sinica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.53.1445
Subject(s) - sputtering , ion , irradiation , mechanism (biology) , materials science , atomic physics , nuclear physics , physics , thin film , nanotechnology , quantum mechanics
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