Open AccessStudy on the evolvement of plasma generated by pulsed laser deposition of thin film
Author(s) -
Zhang Duan-Ming,
Li Guan,
Zhihua Li,
Zhicheng Zhong,
Hou Si-Pu,
Feifei Yang,
Zheng Ke-Yu
Publication year - 2003
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.52.242
Subject(s) - plasma , materials science , pulsed laser deposition , adiabatic process , thin film , laser , deposition (geology) , isothermal process , atomic physics , optics , nanotechnology , physics , thermodynamics , nuclear physics , paleontology , sediment , biology
By finite difference method, the evolvement of plasma generated by a pulsed laser is studied for pulsed laser deposition of KTa065Nb035O3(KTN) thin film. We have discussed the movement of particles in plasma in isothermal and adiabatic expansion stages in more detail. At the same time, we have simulated the change of figure of plasma at different time. Moreover, the physics mechanism in expansion of the plasma have been explained. The theoretical results are compared with our experiments and other author's conclusions.