Open AccessMicroscopic structure studies on the diamond films fabricated by chemical vapor deposition method
Author(s) -
Liu Cun-Ye,
Chang Liu
Publication year - 2003
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.52.1479
Subject(s) - chemical vapor deposition , diamond , materials science , spectroscopy , texture (cosmology) , substrate (aquarium) , vacancy defect , deposition (geology) , spectral line , positron annihilation spectroscopy , annihilation , positron , analytical chemistry (journal) , crystallography , optoelectronics , positron annihilation , chemistry , physics , composite material , nuclear physics , artificial intelligence , image (mathematics) , oceanography , computer science , biology , paleontology , chromatography , quantum mechanics , electron , astronomy , sediment , geology
The microscopic structures of the diamond films generated on Si (100) substrates by chemical vapor deposition have been studied by x-ray wide angle diffraction spectroscopy, grazing incidence x-ray scattering spectra, positrons annihilation lifetime spectroscopy, and qualitative software and Positronfit program. The di ffraction x-ray spectra show a structure difference between the near substrate p art (NSP) and near free-surface part (NFP) of the diamond film specimens, which reflect the weak 111texture in NSP and the strong220 texture in NFP. The positron annihilation lifetime spectroscopy of the specirnens and the analyzing data indicate that the majority of positrons annihilate around 200 ps and 400 p s. The vacancies, vacancy clusters, and voids were found in the film specimens, depending on the processes in which the chemical vapor deposition is generated.