Open AccessInvestigation of abnormal grain growth andtexture change in Ag and Cu films
Author(s) -
Jian-Min Zhang,
Kang Xu
Publication year - 2003
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.52.145
Subject(s) - annealing (glass) , materials science , transmission electron microscopy , diffraction , crystallography , grain growth , silicon , grain size , analytical chemistry (journal) , composite material , nanotechnology , metallurgy , optics , chemistry , physics , chromatography
Abnormal grain growth and texture change in free-standing Ag and Cu films and those attached to the Si substrates have been investigated with transmission electron microscopy (TEM) and x-ray diffraction (XRD) analysis, after annealing the samples at 300℃ for 2 h.The as-deposited Ag and Cu films, as shown by XRD analysis, have(111) and (100) preferred orientations. After annealing, the free-standing films show a slight increase in the (111) texture, while the films attached to the silicon substrates show strong increases in the (100) and (110) textures. Two anomalous large grains with (110) orientation and four anomalous large grains with (211) orientation are observed by TEM in the attached Cu film after annealing. The results are discussed from an energy point of view.