Open Access等离子体增强反应蒸发沉积的氟掺杂氧化铟薄膜的性质
Author(s) -
Cheng Shan-hua,
Ning Zhao-Yuan,
Feng Huang
Publication year - 2002
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.668
Subject(s) - computer science