Open AccessECR-CVD法制备的a-C:F:H薄膜在N2气氛中的热退火研究
Author(s) -
宁兆元 辛煜
Publication year - 2002
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.439
Subject(s) - materials science
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