Open Access蓝宝石衬底上异质外延生长碳化硅薄膜的研究
Author(s) -
Wang Jianping,
Hao Yue,
Peng Jun,
Zhu Zuo-Yun,
Zhang Yonghua
Publication year - 2002
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.1793
Subject(s) - computer science
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