Open Access蓝宝石衬底上异质外延生长碳化硅薄膜的研究
Author(s) -
Jianping Wang,
Yue Hao,
Jun Peng,
Zhu Zuo-Yun,
Yonghua Zhang
Publication year - 2002
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.1793
Subject(s) - computer science