Open Access真空退火对氟化非晶碳薄膜结构的影响
Author(s) -
Huang Feng,
Cheng Shan-Hua,
Zhaoyuan Ning,
Yang Shen-Dong,
Ye Chao
Publication year - 2002
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.1383
Subject(s) - materials science
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom