Open Access真空退火对氟化非晶碳薄膜结构的影响
Author(s) -
Feng Huang,
Cheng Shan-hua,
Ning Zhao-Yuan,
Yang Shen-Dong,
Chao Ye
Publication year - 2002
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.1383
Subject(s) - materials science