Open Access离子注入合成β-FeSi2薄膜的显微结构
Author(s) -
Xiaona Li,
Dong Nie,
Dong Chen,
Tingli Ma,
Jun Xing,
Zhe Zhang
Publication year - 2002
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.115
Subject(s) - computer science , materials science