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离子注入合成β-FeSi2薄膜的显微结构
Author(s) -
Li Xiaona,
Nie Dong,
Chuang Dong,
Ma Tengcai,
Jin Xing,
Zhang Zhe
Publication year - 2002
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.51.115
Subject(s) - computer science , materials science

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