Open AccessINFRARED RESPONSIVITY OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER
Author(s) -
Changhong Chen,
Xinjian Yi,
Xiong Bi-Feng
Publication year - 2001
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.50.450
Subject(s) - microbolometer , responsivity , bolometer , materials science , chopper , temperature coefficient , thin film , optoelectronics , infrared , atmospheric temperature range , optics , physics , photodetector , voltage , detector , composite material , nanotechnology , meteorology , quantum mechanics
VO2 thin films are used for uncooled microbolometer due to their high temperature coefficient of resistance.In this paper,on the basis of fabricating the uncooled bolometer based on VO2 sputtered thin films,the responsivity for the spectral range of 8-12μm region dependence on bias current and chopper frequency is studied.The result indicates that the responsivity is over 17kV/W and up to 10kV/W at a chopper frequency of 10 and 30Hz,respectively.The device having a detectivity D of exceeding 1.0×108cm (Hz)1/2/W and a thermal time constant of 0.011 seconds has been realized.