Open AccessDIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSING
Author(s) -
Chi Ling-Fei,
Lin Kuixun,
Ruohe Yao,
Xuelian Lin,
Chao Yu,
Yunpeng Yu
Publication year - 2001
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.50.1313
Subject(s) - langmuir probe , plasma diagnostics , plasma , plasma parameters , atomic physics , computational physics , derivative (finance) , physics , distribution function , filter (signal processing) , materials science , computer science , quantum mechanics , financial economics , economics , computer vision
Langmuir probe is an important diagnostic tool for measuring plasma parameters. A tuned single probe has been used to diagnostic the electron energy distribution function in Ar radio frequency (13.56MHz) glow plasma. The second derivative of probe I-V characteristic was obtained after using numerical filter procedure to eliminate the statistical noise in measured I-V characteristic. A differential circuit has been designed and applied to measure the second derivative of I-V characteristic on line under the same discharge conditions. The results of the two methods are in agreement with each other.