THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS | Zendy

Yao Ruo-he | Zendy; Chi Ling-Fei | Zendy; Xuanying Lin | Zendy; Wangzhou Shi | Zendy; Lin Kui-Xun | Zendy

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THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS

Author(s) -

Yao Ruo-he,

Chi Ling-Fei,

Xuanying Lin,

Wangzhou Shi,

Lin Kui-Xun

Publication year - 2000

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.49.922

Subject(s) - langmuir probe , plasma , plasma diagnostics , materials science , atomic physics , plasma parameters , glow discharge , radio frequency , electron , computational physics , physics , computer science , telecommunications , quantum mechanics

Langmuir probe is an important tool to diagnose the plasma in radio frequency (rf) glow discharge. A new method has been used to obtain the electron energy distribution function in plasma by the numerical differentiation of the I-V probe characteristic.This method is based on Fourier transform and could overcome the defects of other methods. In this way, the second derivative signal of Langmuir probe I-V characteristic is obtained automatically and accurately. The mean electron energy and electron concentrations in rf glow discharge plasma in silane were obtained by Langmuir probe.

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