Open AccessTHE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS
Author(s) -
Ruohe Yao,
Chi Ling-Fei,
Xuelian Lin,
Shi Wang-Zhou,
Kaifeng Lin
Publication year - 2000
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.49.922
Subject(s) - langmuir probe , plasma , plasma diagnostics , materials science , atomic physics , plasma parameters , glow discharge , radio frequency , electron , computational physics , physics , computer science , telecommunications , quantum mechanics
Langmuir probe is an important tool to diagnose the plasma in radio frequency (rf) glow discharge. A new method has been used to obtain the electron energy distribution function in plasma by the numerical differentiation of the I-V probe characteristic.This method is based on Fourier transform and could overcome the defects of other methods. In this way, the second derivative signal of Langmuir probe I-V characteristic is obtained automatically and accurately. The mean electron energy and electron concentrations in rf glow discharge plasma in silane were obtained by Langmuir probe.