Open Access溅射制备薄膜过程中的光谱在线测量研究
Author(s) -
沈杰 刘隆鉴
Publication year - 2000
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.49.306
Subject(s) - computer science
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