Open AccessSi(111)表面在NH3气氛下形成Si3N4薄膜的STM研究
Author(s) -
Zhai Guang-Jie,
Yang Jian-Shu,
Chen Xian-Bang,
Xueshen Wang
Publication year - 2000
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.49.215
Subject(s) - materials science , silicon nitride , physics , silicon , optoelectronics
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