Open AccessIn Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin Films
Author(s) -
Bo Liu,
Jiang Lei,
Zhuying Zhou,
He Mian-hong,
Zhao Guo-qing,
Xiangfu Zong
Publication year - 2000
Publication title -
acta physica sinica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.49.164
Subject(s) - sputtering , ion , materials science , in situ , thin film , atomic physics , nanotechnology , physics , quantum mechanics , meteorology
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