Open AccessIn Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin Films
Author(s) -
Bo Liu,
Jiang Lei,
Zhou Zhu-ying,
Maowei He,
Guanghui Zhao,
Zong Xiang-fu
Publication year - 2000
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.49.164
Subject(s) - sputtering , ion , materials science , in situ , thin film , atomic physics , nanotechnology , physics , quantum mechanics , meteorology