Open AccessSIZE-SEPARATION EFFECT OF BLUE-EMITTING POROUS SILICON IN RTO PROCESS
Author(s) -
Xiaonan Fu,
Xinjian Li,
Jiaguo Yu,
Qiankai Yao,
Fang Zeng,
Qianwang Chen,
Yuheng Zhang
Publication year - 2000
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.49.1180
Subject(s) - photoluminescence , materials science , porous silicon , silicon , etching (microfabrication) , hydrothermal circulation , blueshift , thermal oxidation , wavelength , thermal , porosity , optoelectronics , porous medium , chemical engineering , nanotechnology , composite material , layer (electronics) , engineering , physics , meteorology
Blue-emitting porous silicon(PS) prepared by hydrothermal etching was treated by rapid thermal oxidation (RTO) process.Accompanying with the blue shift of the whole photoluminescence(PL) spectrum, the previous single PL peak split into two separate PL peaks. Simultaneously, the size-reduction and size-separation of the silicon nanocrystallites were observed. This result indicates that the short-wavelength emissions in PS are also strongly size-dependent.